wet etch Ta and TaN# Engineering - 工程
j*n
1 楼
Does anyone know how to wet etch Ta or TaN layer?
I have about 500A thick Ta(N) layer with SiO2 or SiN passivation.
So I don't want the solution attack too much of the passivation.
Thanks a lot
I have about 500A thick Ta(N) layer with SiO2 or SiN passivation.
So I don't want the solution attack too much of the passivation.
Thanks a lot