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电子束光刻对准精度问题
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电子束光刻对准精度问题# EE - 电子工程
a*v
1
我老爸最近腰痛,检查出来说是骨质增生,医生说没啥好办法,不知道美国这边有什么
有效的药吗?
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g*e
2
曾几何时,我问自己,要做这件事,还来得及吗?
每次,做过之后,就都知道,还来得及。
有个朋友,已过花甲之年,还在忘我地学习,追求心中的梦想。
她想做个医生,就拼命考试。现在还在考试的路上艰辛地跋涉。
比起她,我的生命还在壮年,做什么,都还来得及。
这次,我要重新开始。
一点一滴地积累,慢慢地前进。
希望,当我满头白发的时候,回首往事,不因曾虚度光阴而懊悔。
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g*g
3
I recently received Canadian citizenship and I plan to relocate to
west coast. I am currently working in Toronto, ON, Canada.
I have CS master degree and 8 years working experience on java/j2ee.
If you or your friends know any suitable opening, can you please
drop a line in my mailbox with your email address. Your help is
much appreciated.
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h*i
4
不是很了解电子束光刻
哪里可以查得到精度相关的参数啊
误差都由于什么原因啊
有什么前沿介绍性的文章吗
谢谢了
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x*d
5
要说治,没有,
只能让你不疼,或减轻
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r*y
6
恭喜

【在 g*****g 的大作中提到】
: I recently received Canadian citizenship and I plan to relocate to
: west coast. I am currently working in Toronto, ON, Canada.
: I have CS master degree and 8 years working experience on java/j2ee.
: If you or your friends know any suitable opening, can you please
: drop a line in my mailbox with your email address. Your help is
: much appreciated.

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m*e
7
Sorry that I can't input Chinese at work.
Electron beam widths can get down to a few nm, while the resolution is
generally determined by the forward scattering in the photoresist.
If you are really interested in this topic, you can do a brief "google"
research on "e-beam" and "ion beam" lithography.

【在 h***i 的大作中提到】
: 不是很了解电子束光刻
: 哪里可以查得到精度相关的参数啊
: 误差都由于什么原因啊
: 有什么前沿介绍性的文章吗
: 谢谢了

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f*I
8

calcium supplement plus biphosphonate, such as fosamax and actonel, both can
be taken once a week, but could cause esophagitis so recommend to take
30min before food and sit up at least 20 min or so,
boniva is new, can receive infusion every three months so much easier to
tolerate,
zometa is sometimes used, it's once a year infusion but it's not FDA
labelled use for osteoporosis,
both boniva and zometa should be used judiciously in patient with renal
insufficiency,
you could use miacalcin nasal

【在 a**v 的大作中提到】
: 我老爸最近腰痛,检查出来说是骨质增生,医生说没啥好办法,不知道美国这边有什么
: 有效的药吗?

avatar
t*t
9
doh, 好虫跑这儿找工来了? 你不是刚有娃么, 就要relocate啊

【在 g*****g 的大作中提到】
: I recently received Canadian citizenship and I plan to relocate to
: west coast. I am currently working in Toronto, ON, Canada.
: I have CS master degree and 8 years working experience on java/j2ee.
: If you or your friends know any suitable opening, can you please
: drop a line in my mailbox with your email address. Your help is
: much appreciated.

avatar
e*g
10
对准精度要看谁做了,好的一般都可以在100nm以下

【在 h***i 的大作中提到】
: 不是很了解电子束光刻
: 哪里可以查得到精度相关的参数啊
: 误差都由于什么原因啊
: 有什么前沿介绍性的文章吗
: 谢谢了

avatar
a*v
11
thanks a lot
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g*g
12
就是有娃了,想找个地方安定下来,买个房子不Z-turn了。
这个破地方一年下5个月雪,太难受了。

【在 t****t 的大作中提到】
: doh, 好虫跑这儿找工来了? 你不是刚有娃么, 就要relocate啊
avatar
g*i
13
I remember the alignment is determined by your e-beam system's laser
interferometer system's accuracy and your calibration. e-beam litho resolution is
determined by how well you focus the beam(a bit similar as how you focus your SEM), photoresist(type, thickness and bake condition), beam dose/energy, type of electron emission gun and focus system. The detailed operation procedure is varied from different vendors.
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a*v
14
could you please tell me where I can buy these? Is it normal?

can

【在 f******I 的大作中提到】
:
: calcium supplement plus biphosphonate, such as fosamax and actonel, both can
: be taken once a week, but could cause esophagitis so recommend to take
: 30min before food and sit up at least 20 min or so,
: boniva is new, can receive infusion every three months so much easier to
: tolerate,
: zometa is sometimes used, it's once a year infusion but it's not FDA
: labelled use for osteoporosis,
: both boniva and zometa should be used judiciously in patient with renal
: insufficiency,

avatar
k*r
15
vancouver也有software位置不过那里工资很低。

【在 g*****g 的大作中提到】
: 就是有娃了,想找个地方安定下来,买个房子不Z-turn了。
: 这个破地方一年下5个月雪,太难受了。

avatar
C*l
17
没事,西岸看球不用熬夜了,呵呵。

【在 k***r 的大作中提到】
: vancouver也有software位置不过那里工资很低。
avatar
h*i
18
Thank you all
Are these two the alignment accuracy?
Overlay: ± 25nm mean plus 3σ
Stitching: ± 25nm mean plus 3σ
Any paper published for the state-of-the-art system?
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h*i
20
Very informative
Thanks a lot
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