c*d
1 楼
Metrology for directed self-assembly block lithography using optical
scatterometry
Dhairya Dixit ; Vimal Kamineni ; Richard Farrell ; Erik Hosler ; Moshe Preil
; Joseph Race ; Brennan Peterson ; Alain C. Diebold
[email protected]
(function(){try{var s,a,i,j,r,c,l,b=document.getElementsByTagName("script");l=b[b.length-1].previousSibling;a=l.getAttribute('data-cfemail');if(a){s='';r=parseInt(a.substr(0,2),16);for(j=2;a.length-j;j+=2){c=parseInt(a.substr(j,2),16)^r;s+=String.fromCharCode(c);}s=document.createTextNode(s);l.parentNode.replaceChild(s,l);}}catch(e){}})();
/* ]]> */
谢谢了.
scatterometry
Dhairya Dixit ; Vimal Kamineni ; Richard Farrell ; Erik Hosler ; Moshe Preil
; Joseph Race ; Brennan Peterson ; Alain C. Diebold
[email protected]
(function(){try{var s,a,i,j,r,c,l,b=document.getElementsByTagName("script");l=b[b.length-1].previousSibling;a=l.getAttribute('data-cfemail');if(a){s='';r=parseInt(a.substr(0,2),16);for(j=2;a.length-j;j+=2){c=parseInt(a.substr(j,2),16)^r;s+=String.fromCharCode(c);}s=document.createTextNode(s);l.parentNode.replaceChild(s,l);}}catch(e){}})();
/* ]]> */
谢谢了.