Re: MEMS 和 nanotechnology联系大吗？# EE - 电子工程
m*e
1 楼
Not much.
MEMS deals with length scale around 1 um to several hundred
microns.
Nanotechnology deals with length of sub micron, mostly
around the scale of 1 -100 nm.
People do MEMS because their fabrication facility have
already been outdated, and can no longer to catch up the
latest development small device :-)
Nanotechnology requres the state of the art equipment except
the areas that utilize the natural chemical or biological
nano-system.
However, there is a NEMS (nano-electrical-mechanical-sy
MEMS deals with length scale around 1 um to several hundred
microns.
Nanotechnology deals with length of sub micron, mostly
around the scale of 1 -100 nm.
People do MEMS because their fabrication facility have
already been outdated, and can no longer to catch up the
latest development small device :-)
Nanotechnology requres the state of the art equipment except
the areas that utilize the natural chemical or biological
nano-system.
However, there is a NEMS (nano-electrical-mechanical-sy