Re: poly etch rate 的问题# EE - 电子工程
s*r
1 楼
Sorry i don't have the book.
But according to my experience, ER of doped poly was slower
that undoped. At first, I did not believe my experiment
lot's result and checked again. It really showed Doped poly
was etched slower than undoped. I did not find the answer
yet. Perhaps, it was because of the following 'drive-in'
like diffusion of doped poly, which might result in a thin
layer of silicon oxide over poly surface. Usually, undoped
poly was not followed by a diffusion step.
By the way, I used
But according to my experience, ER of doped poly was slower
that undoped. At first, I did not believe my experiment
lot's result and checked again. It really showed Doped poly
was etched slower than undoped. I did not find the answer
yet. Perhaps, it was because of the following 'drive-in'
like diffusion of doped poly, which might result in a thin
layer of silicon oxide over poly surface. Usually, undoped
poly was not followed by a diffusion step.
By the way, I used