Re: 请教:激光检测thin film 厚度?# EE - 电子工程
y*n
1 楼
Transparency or not depends on which wavelength you are talking about.
There are many methods to measure thin film's thickness, for example, using
AFM (Atomic Force Microscope), Cross sectional SEM (Scanning Electron
Microscope). For in situ measurement, you can use ellipsometry or QCM (Quartz
Crystal Microbalance), all those are standard methods for semiconductor
manufactuaring hence you can find their principles easily from related books
and internet.
There are many methods to measure thin film's thickness, for example, using
AFM (Atomic Force Microscope), Cross sectional SEM (Scanning Electron
Microscope). For in situ measurement, you can use ellipsometry or QCM (Quartz
Crystal Microbalance), all those are standard methods for semiconductor
manufactuaring hence you can find their principles easily from related books
and internet.